| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for feeding ozone-water mixed liquid, and to provide a substrate processing apparatus equipped therewith. SOLUTION: The device for feeding ozone-water mixed liquid is supplied with a processing liquid and an ozone water from each of a processing-liquid supplying line and an ozone-water supplying line. The feeder includes a mixing line to mix the processing liquid and the ozone water for producing the ozone-water mixed liquid within a predetermined concentration, and a distributing line to distribute the ozone-water mixed liquid produced in the mixing line into a processing unit. A mixing valve and a static mixer are provided in the mixing line. The ozone-water mixed liquid in a predetermined concentration is produced and supplied under an in-line mixing method without using a mixing vessel such as a mixing tank. COPYRIGHT: (C)2009,JPO&INPIT
|
