| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a suction facility of exhaust gas capable of maintaining and stabilizing the quantity of exhaust gas sucked from an exhaust gas generation source to a target value when starting a stopped standby exhauster when switching the operation of the standby exhauster from the operation of a main exhauster. <P>SOLUTION: The suction facility of exhaust gas includes a chamber box 1 collecting exhaust gas from a clean room serving as the exhaust gas generation source through a duct; a main damper device 3 adjusting the opening degree of a main duct 2 connected in communication with the chamber box; the main exhauster 6 connected in communication with the main duct; a standby damper device 8 adjusting the opening degree of a standby duct 7 connected in communication with the chamber box in parallel with the main duct 2; the standby exhauster 10 connected in communication with the standby duct; a pressure detecting means 11 detecting static pressure in the chamber box; and a controller 12 transmitting commands of the rotating speed of each exhauster driving motor to inverters of the main exhauster and the standby exhauster based on the detection result of the pressure detecting means. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
