The present invention relates to a fully integrated ISFET valveless micropump for use as a pH sensor and as a chemical based sensor especially intended for Wireless Sensor Network (WSN) characterized in that wherein the valveless pump with ISFET is embedded along a pump channel and temperature sensors at its inlet and wherein a membrane in the middle is the pump diaphragm and is electrostatically actuated by an electrode above it which is deposited on the glass and wherein when the membrane controlled by a microcontroller is in motion, fluid or gas would be pumped in thru the inlet and travels thru the channel where ISFET is located and out thru the outlet.
申请公布号
WO2009045092(A3)
申请公布日期
2009.06.11
申请号
WO2008MY00117
申请日期
2008.09.29
申请人
MIMOS BERHAD;SYONO, MOHD ISMAHADI;ABDUL RANI, ROZINA;LEE, HING WAH
发明人
SYONO, MOHD ISMAHADI;ABDUL RANI, ROZINA;LEE, HING WAH