发明名称 Plant for VACUUM-PLASMA TREATMENT of articles
摘要 A plant for vacuum-plasma treatment of articles, which contains a working chamber with the isolated carrier of articles, emission chamber with the exhaustible cathode, which is connected with a working chamber at least through one orifice, basal source of feed, the positive pole of which is connected with the body of the emission chamber, and the negative pole of which is connected with the exhaustible cathode, auxiliary source of feed, the positive pole of which is connected with the carrier of articles, and a negative pole is connected with the body of the emission chamber. The body of the emission chamber is isolated from the body of the working chamber.
申请公布号 UA41714(U) 申请公布日期 2009.06.10
申请号 UA20080011423U 申请日期 2008.09.22
申请人 SABLIEV LEONID PAVLOVYCH;ANDREIEV ANATOLII OPANASOVYCH;SHULAIEV VALERII MYKHAILOVYCH;HRIHORIEV SIERHIEI NIKOLAIEVICH 发明人 SABLIEV LEONID PAVLOVYCH;ANDREIEV ANATOLII OPANASOVYCH;SHULAIEV VALERII MYKHAILOVYCH;HRIHORIEV SIERHIEI NIKOLAIEVICH
分类号 C23C8/06 主分类号 C23C8/06
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