发明名称 |
Method for producing a vitreous silica crucible |
摘要 |
<p>The present invention relates to a vitreous silica crucible for pulling up silicon single crystals by a pulling-up process having a first stage and a second stage after the first stage. The crucible comprises a transparent inner layer containing inner layer bubbles, and an outer layer containing outer layer bubbles. The second stage expansion coefficient X2 of the inner-layer bubbles during the second stage is set to 1/3 or less of the first stage expansion coefficient X1 of the inner-layer bubbles during the first stage.</p> |
申请公布号 |
EP2067883(A2) |
申请公布日期 |
2009.06.10 |
申请号 |
EP20080020717 |
申请日期 |
2008.11.28 |
申请人 |
JAPAN SUPER QUARTZ CORPORATION |
发明人 |
KISHI, HIROSHI;KANDA, MINORU |
分类号 |
C30B15/10;C30B29/06 |
主分类号 |
C30B15/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|