发明名称 Planar air amplifier on substrate
摘要 An air amplifier jet pump is formed by etching channels in a planar substrate 212 and closing with a lid 211. Secondary or induced gas is introduced into a converging section of a main channel 204 and primary gas is introduced through slots 209a,b in the walls of the channel at a waist in the channel and adheres to the walls 206a,b of a diverging section by the Coanda effect. The primary gas induces secondary gas flow by a Venturi effect pressure drop. The secondary gas may contain an analyte in the form of ions from an electrospray to provide an increased analyte signal in sensor and analysis systems e.g. a mass or and ion mobility spectrometer. May be formed using different combinations of photolithography and etching, and an example is presented of a microengineered air amplifier integrated with a microengineered electrospray ionization source on common substrates e.g. metallic or semiconductor.
申请公布号 GB2455351(A) 申请公布日期 2009.06.10
申请号 GB20070023952 申请日期 2007.12.07
申请人 MICROSAIC SYSTEMS LIMITED 发明人 RICHARD SYMS
分类号 F04F5/16;F04F5/46;H01L21/64 主分类号 F04F5/16
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