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发明名称
Mikromechanisches Bauelement
摘要
申请公布号
DE102006036499(B4)
申请公布日期
2009.06.04
申请号
DE200610036499
申请日期
2006.07.28
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
WOLTER, ALEXANDER;SCHENK, HARALD
分类号
B81B3/00
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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