| 发明名称 |
CARRIER GAS SYSTEM AND COUPLING SUBSTRATE CARRIER TO A LOADPORT |
| 摘要 |
<p>A method for pressurizing a substrate carrier including pressurizing a chamber that is of unitary construction with the carrier and/or a substrate cassette within the carrier and maintaining a pressure within the carrier by releasing gas from the chamber into the carrier.</p> |
| 申请公布号 |
KR20090057308(A) |
申请公布日期 |
2009.06.04 |
| 申请号 |
KR20097007390 |
申请日期 |
2007.09.14 |
| 申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
WILLIAM FOSNIGHT;DANIEL BABBS |
| 分类号 |
B65H1/24;B65G65/02;H01L21/677 |
主分类号 |
B65H1/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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