| 摘要 |
PROBLEM TO BE SOLVED: To improve wear resistance and thermal quick responsiveness by forming an amorphous or semi-amorphous carbon film of insulator, having hardness similar to that of diamond and respectively specified energy band width and thermal conductivity, on the top of the projecting part of the surface with rugged shape, to be subjected to film formation, of a head. SOLUTION: A glazed glass layer 2, heat generating body layer 3, and an electrode 4 are laminated on a ceramic substrate 1, and further, the surface with rugged shape, particularly the top of the projecting part with which thermosensive paper is rubbed, is coated with a wear resistant layer 5. This wear resistant layer 5 is a carbon film of insulator and preferably has hardness similar to that of diamond and also has >=2.0 eV energy band with and >=2.5 W/cmdeg thermal conductivity. This carbon film can be formed by a plasma vapor phase process by using hydrocarbon, etc., as raw material gas at a temperature as low as about 100-450 deg.C. It is preferable that this carbon film is amorphous or has microcrystals of 0.5-2 nm and has <=30 mole% hydrogen content. |
