SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD USING THE SAME,申请号KR20070101873-传众专利搜索

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发明名称	SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD USING THE SAME
摘要
申请公布号	KR100900752(B1)	申请公布日期	2009.06.02
申请号	KR20070101873	申请日期	2007.10.10
申请人		发明人
分类号	H01L21/68;B82B3/00;H01L21/687	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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