| 摘要 |
<p>There is provided an aberration measuring method for evaluating the aberration of a light spot image detected by a photodetector and the light spot image, with an inexpensive instrument and at a high speed. In the method, based on a model observation signal and an observation signal acquired from a scan output signal of the photodetector receiving the light spot image, the aberration of an optical system for forming the light spot image is analyzed from data at at least two locations.</p> |
