发明名称 APPARATUS AND METHODS FOR REDUCING RESTRICTIONS TO AIR FLOW IN AN ABATEMENT SYSTEM
摘要 <p>An abatement system is provided, including an abatement unit adapted to abate effluent using ambient air; and an ambient air delivery system in fluid communication with the abatement unit and adapted to deliver ambient air to the abatement unit; wherein the ambient air delivery system allows sufficient ambient air to flow into the abatement unit to abate the effluent without compressed air. Numerous other aspects are provided.</p>
申请公布号 WO2009065094(A1) 申请公布日期 2009.05.22
申请号 WO2008US83712 申请日期 2008.11.15
申请人 APPLIED MATERIALS, INC.;CURRY, MARK W.;CRAWFORD, SHAUN W.;PAGE, BARRY;VERMEULEN, ROBBERT M.;FOX, ALLEN;BROWN, DANIEL S.;CORREA, RENE T.;LOLDJ, YOUSSEF A.;PYZEL, WILLIAM D.;CLARK, DANIEL O. 发明人 CURRY, MARK W.;CRAWFORD, SHAUN W.;PAGE, BARRY;VERMEULEN, ROBBERT M.;FOX, ALLEN;BROWN, DANIEL S.;CORREA, RENE T.;LOLDJ, YOUSSEF A.;PYZEL, WILLIAM D.;CLARK, DANIEL O.
分类号 F02B33/44 主分类号 F02B33/44
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