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发明名称
嵌壁式电晶体结构之制备方法
摘要
本发明提出一种嵌壁式电晶体结构之制备方法,其首先以离子布植形成掺杂区于一基板上,再形成复数个闸极隔离区块于该基板上,并形成复数个第一间隙壁于该闸极隔离区块之侧壁,再局部去除未被该第一间隙壁及该闸极隔离区块覆盖之基板以形成复数个凹部于该第一间隙壁间之基板中,并同时形成自我对准之源/汲极掺杂区。之后,形成一闸氧化层于该凹部之内壁,再形成一闸极结构于该闸氧化层上而完成该嵌壁式电晶体结构。
申请公布号
TW200921795
申请公布日期
2009.05.16
申请号
TW096141269
申请日期
2007.11.02
申请人
茂德科技股份有限公司
发明人
林宏洋
分类号
H01L21/336(2006.01)
主分类号
H01L21/336(2006.01)
代理机构
代理人
王宗梅
主权项
地址
新竹市科学工业园区力行路19号3楼
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