USES OF SELF-ORGANIZED NEEDLE-TYPE NANOSTRUCTURES

摘要

The invention relates to production methods as well as elements (parts) having a nanostructure (2; 4, 4a) for improving the optical behavior of components and devices and/or improving the behavior of sensors by increasing the active surface area. The nanostructure (2) is produced in a self-masking manner by means of RIE etching and can be provided with suitable coatings while the material composition of the nanostructure (2) can be modified.