| 摘要 |
<p>The invention relates to a device for a probe microscopic examination of a sample (30), particularly a scanning probe microscopic examination, having a measuring probe (6) and a displacement mechanism (10, 12), which is configured in such a manner to move the measuring probe (6) from an initial position into an end position by means of a relative movement between the measuring probe (6) and a sample-holder, wherein the measuring probe (6)is in a measuring position, at least in the end position relative to a sample (3) disposed in the sample-holder, wherein the measuring probe (6) is in a measuring position at least in the end position relative to a probe (3) that is disposed in the sample-holder, wherein the displacement mechanism (10, 12) comprises a displacement device (10), which is configured to perform a partial displacement of the measuring probe (6) relative to the sample-holder in a relative movement, relative movement, and a further displacement device (12), which is configured to perform a further partial displacement of the measuring probe (6) relative to the sample-holder in a relative movement, and wherein the displacement device (10) and the further displacement device (12) are coupled to a control device, which is configured to provide a target value deviation for the partial displacement processing a control signal for the performance of the further partial displacement by means of the further displacement device (12).</p> |
