A METHOD FOR IMPROVING MASS-SENSITIVITY OF A QUARTZ VIBRATOR MICROBALANCE USING ZINC OXIDE NANOBAR

摘要

A method for improving mass-sensitivity of a quartz oscillator microbalance using a zinc oxide nano-bar is provided to use to diagnose all kinds of diseases by detecting little amount of material included in a sample. A sensor detecting fluid samples comprises: a vibrating piece in which a zinc oxide nano-bar is formed in a surface; and a probe formed in the surface of the nano-bar. The vibrating piece is a quartz oscillator or the vibrating piece of cantilever. The probe is formed in a gold coating side formed in the surface of the nano-bar. The length of the nano-bar is 0.6 - 2.0 micron.