| 摘要 |
<p>A pressure control apparatus which controls a pressure of air supplied from a supply hole of a base having a plurality of holes to a supply port of a valve having a plurality of ports is interposed between the base and the valve. This pressure control apparatus comprises a pressure control section which controls a pressure of the air such that the pressure becomes equal to a set pressure, a booster section which outputs a large amount of air to the valve by controlling an output pressure by air from this pressure control section, and a signal control section which outputs a monitor signal indicative of completion of pressure setting when the pressure of air output from the booster section becomes equal to the set pressure.</p> |
