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发明名称
微结构制造方法
摘要
本发明系提供一种微结构的制造方法,其至少包括下列步骤:(1)提供具有一外围具有复数个孔洞结构之滚轮;(2)提供一光阻剂层,并使该滚轮透过设置在该滚轮与该光阻剂层之间的一薄膜对该光阻剂层进行压印,以使该光阻剂层中的光阻剂透过该孔洞结构的压印而成形于该薄膜上;以及(3)提供一光源,用以照射成形于该薄膜上之该光阻剂,以在该薄膜上形成复数个微结构。
申请公布号
TW200914362
申请公布日期
2009.04.01
申请号
TW096136651
申请日期
2007.09.29
申请人
台北市私立开南高级商工职业学校
发明人
杨申语;杨铭乾;李文福;翁永进;翁永春;翁锦龙
分类号
B81B5/00(2006.01);B41M5/40(2006.01);G03F5/14(2006.01)
主分类号
B81B5/00(2006.01)
代理机构
代理人
蔡清福
主权项
地址
台北市中正区济南路1段6号
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