发明名称 Driving apparatus, exposure apparatus, and device manufacturing method
摘要 A driving apparatus which comprises a stator and two movable elements. The stator includes a first area and a second area. The movable elements can move on the stator. The movable elements include magnets, while the stator includes a coil unit. The coil unit includes a driving coil which independently drives the two movable elements within the first area and the second area, and a swap coil which swaps the two movable elements between the first area and the second area. The coil unit is configured such that the swap coil and at least part of the driving coil are superimposed on each other.
申请公布号 US7508099(B2) 申请公布日期 2009.03.24
申请号 US20070746797 申请日期 2007.05.10
申请人 CANON KABUSHIKI KAISHA 发明人 KORENAGA NOBUSHIGE
分类号 H02K41/00 主分类号 H02K41/00
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