APPARATUS FOR STERILIZING WITH OZONE PLASMA, AND DRIVING METHOD THEREOF

摘要

A device for sterilization using ozone plasma and a driving method for the same are provided, which generate or remove ozone by controlling drive of the ozone plasma generator. A device for sterilization using ozone plasma comprises: a sterilization chamber(160) in which a sealed space is formed and objects to be sterilized by ozone are arranged; an ozone sensor(170) which detects the concentration of the ozone inside the sterilization chamber and transforms the ozone concentration signal and outputs the signal; an ozone plasma generator(130) generating the ozone and removing the ozone in the ozone removing condition; and a sterilization controller(110) controlling the drive of the ozone plasma generator.