发明名称 Method of forming controllably conductive oxide
摘要 In fabricating a memory device, a first electrode is provided. An alloy is formed thereon, and the alloy is oxidized to provide an oxide layer. A second electrode is provided on the oxide layer. In a further method of fabricating a memory device, a first electrode is provided. Oxide is provided on the first electrode, and an implantation step in undertaken to implant material in the oxide to form a layer including oxide and implanted material having an oxygen deficiency and/or defects therein. A second electrode is then formed on the layer.
申请公布号 US2009067213(A1) 申请公布日期 2009.03.12
申请号 US20070899597 申请日期 2007.09.06
申请人 BUYNOSKI MATTHEW;CHOI SEUNGMOO;GOPALAN CHAKRAVARTHY;LIAO DONGXIANG;MARRIAN CHRISTIE 发明人 BUYNOSKI MATTHEW;CHOI SEUNGMOO;GOPALAN CHAKRAVARTHY;LIAO DONGXIANG;MARRIAN CHRISTIE
分类号 G11C11/00;B05D5/12 主分类号 G11C11/00
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