发明名称 Method for Manufacturing of the Image Sensor
摘要 Methods for manufacturing an image sensor are provided. A semiconductor substrate having a transistor can be prepared, and a proton layer can be formed in the substrate. A hydrogen gas layer can be formed by performing a heat treatment process on the semiconductor substrate, and a bottom portion of the semiconductor substrate defined by the hydrogen gas layer can be removed.
申请公布号 US2009068784(A1) 申请公布日期 2009.03.12
申请号 US20080205026 申请日期 2008.09.05
申请人 KIM SEOUNG HYUN 发明人 KIM SEOUNG HYUN
分类号 H01L31/18 主分类号 H01L31/18
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