| 发明名称 |
Transportation system and transportation method |
| 摘要 |
<p>A conveyor 4 for transporting a reticle cassette 18 is provided. A lifter 16 of a rail vehicle 14 lifts the reticle cassette 18 for transferring the reticle cassette 18 between the inside of a dummy FOUP 22 and the conveyor 4.</p> |
| 申请公布号 |
EP1845552(B1) |
申请公布日期 |
2009.03.11 |
| 申请号 |
EP20070007643 |
申请日期 |
2007.04.13 |
| 申请人 |
MURATA KIKAI KABUSHIKI KAISHA |
发明人 |
ITO, YASUHISA |
| 分类号 |
H01L21/00;B65G47/52 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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