发明名称 MANUFACTURING METHOD OF HEAT RADIATION STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide the manufacturing method of a heat radiation structure which has high reliability of a joint portion and whose manufacturing cost is low and which has satisfactory shape precision. SOLUTION: The heat radiation structure A has a sprayed metal layer 28 deposited on a heat sink 21 by a thermal spraying method (cold spraying method). Thus, the sprayed metal layer 28 is deposited by using the thermal spraying method to form the heat radiation structure A. At this time, processing strain is caused nearby the top surface of the heat sink 21 owing to the thermal spraying and the heat radiation structure A curves such that the top surface side of a plane portion 21a of the heat sink becomes a projection. Then the heat radiation structure A is pressed after or while being heated. Recrytallization progresses and then the processing strain caused in the heat sink 21 owing to the thermal spraying is relaxed to correct deformation of the heat radiation structure A. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009043814(A) 申请公布日期 2009.02.26
申请号 JP20070205257 申请日期 2007.08.07
申请人 SUMITOMO ELECTRIC IND LTD 发明人 FUTAI KAZUHIKO;MAEDA TAKAO;TOYODA HARUHISA
分类号 H01L23/373 主分类号 H01L23/373
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