| 摘要 |
PROBLEM TO BE SOLVED: To improve the uniformity of drying rate of a fluid material discharged from a plurality of discharge nozzles. SOLUTION: This coater 1 operates in the following way: an organic EL liquid is discharged to the surface of a substrate 9 from a plurality of discharge nozzles 17 arranged at an equal interval, in the subscan direction perpendicular with the main scan direction, while an coating head 14 is run in the main scan direction. The substrate 9 is moved in the subscan direction each time the main scan is completed. In this case, the density of a solvent component of the organic EL liquid in the peripheral atmosphere of a linear element formed by the discharge nozzle 17 at the rear side of the relative moving direction of the substrate 9 in the subscan direction, becomes comparatively low right after one main scan. However, the remedy is that the cooling of the substrate 9 by water circulating through a flow path 111 inside a substrate retaining part 11, delays the drying rate of the organic EL liquid and a following main scan can be performed before the drying process. Thus, it is inhibited to allow the drying process of the organic EL liquid discharged from a plurality of discharge nozzles 17 to terminate right after the discharge under different conditions, and the improvement of the uniform drying rate of the organic EL liquid can be achieved. COPYRIGHT: (C)2009,JPO&INPIT
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