发明名称 Gas storage and dispensing system with monolithic carbon adsorbent
摘要 A fluid storage and dispensing apparatus, including a cylindrical fluid storage and dispensing vessel having an interior volume, in which the interior volume contains a physical adsorbent for sorptively retaining a fluid thereon and from which the fluid is desorbable for dispensing from the vessel, and a valve head coupled to the vessel for dispensing desorbed fluid from the vessel. The physical adsorbent includes a monolithic carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of the adsorbent including slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity including micropores of diameter <2 nanometers; and (c) having a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter.
申请公布号 US7494530(B2) 申请公布日期 2009.02.24
申请号 US20050103224 申请日期 2005.04.11
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 CARRUTHERS J. DONALD
分类号 B01D53/04 主分类号 B01D53/04
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