| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element that achieves high reliability and excellent piezoelectric property using a simple process as well as a manufacturing method thereof, and to provide an actuator and a liquid injection head including such a piezoelectric element. <P>SOLUTION: A method for manufacturing a piezoelectric element 100 includes a step to form a bottom electrode 12 that is patterned on the upper side of a substrate 10, a step to form a titanium layer 14 on the substrate 10 and the bottom electrode 12, a step to form a piezoelectric substance element layer 16 on the upper side of the titanium layer 14, a step to form a top electrode 18 on the upper side of the piezoelectric substance element layer 16, and a step to pattern at least the top electrode 18 and the piezoelectric substance element layer 16, which can be carried out such that a first part 16a where the piezoelectric substance element layer 16 is located above the bottom electrode 12 via the titanium layer 14 and a second part 16b where the piezoelectric substance element layer 16 is located above the substrate 10 via the titanium layer 14 are provided. <P>COPYRIGHT: (C)2009,JPO&INPIT |
