发明名称 CONDUCTIVE BALL LOADING APPARATUS
摘要 PROBLEM TO BE SOLVED: To prevent conductive balls from being gathered on one side inside a ball cup and to surely drop the conductive balls to the insertion part of an array mask by firmly sucking and holding the array mask and surely transmitting the vibrations of a vibration means. SOLUTION: The following means are adopted for the conductive ball loading apparatus. First, the loading apparatus is provided with the array mask where a conductive ball insertion part is formed, a mask supporting means for supporting the array mask above an object to be loaded and the vibration means for imparting the vibrations to the array mask, wherein the ball cup is moved along the upper surface of the array mask during the vibrations of the array mask, so as to drop the conductive balls to the insertion part of the array mask and load them on the object to be loaded. Secondly, the vibration means has a vibration source and an abutting surface connected to the vibration source and provided with a suction port, so as to suck the array mask to the abutting surface, and transmit the vibrations of the vibration source through the abutting surface to the array mask. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009038242(A) 申请公布日期 2009.02.19
申请号 JP20070201982 申请日期 2007.08.02
申请人 SHIBUYA KOGYO CO LTD 发明人 NIITSUMA KAZUO
分类号 H01L21/60 主分类号 H01L21/60
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