发明名称 Mems Microphone And Method For Producing Said Microphone
摘要 An MEMS microphone is bonded onto the surface of an IC component containing at least one integrated circuit suitable for the conditioning and processing of the electrical signal supplied by the MEMS microphone. The entire component is simple to produce and has a compact and space-saving construction. Production is accomplished in a simple and reliable manner.
申请公布号 US2009041270(A1) 申请公布日期 2009.02.12
申请号 US20050792515 申请日期 2005.10.12
申请人 AUSTRIAMICROSYSTEMS AG 发明人 SCHRANK FRANZ;SCHREMS MARTIN
分类号 H04R25/00;H01L21/00 主分类号 H04R25/00
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