| 摘要 |
<p>In calibration mode, an equilibrium period after an article to be inspected and a reference tank are filled with pressurized gas is divided equally into two, differential pressure variations (omicronP1 and omicronP2) are measured every time when the first half time (T1) and the second half time (T2) elapse, and a differential pressure variation (omicronP3) occurring during the time (T2) of inspection period is measured. Furthermore, a differential pressure variation (CT2) occurring while the time (T2) elapses after a moment when the influence of adiabatic change is considered to be settled sufficiently is measured, drift correction coefficient K=(omicronP3-CT2)/(omicronP1-omicronP2) is calculated from these measurements, stored in a memory, and utilized in inspection mode.</p> |
