AN OPTICAL WAVEGUIDE STRUCTURE AND METHOD OF MANUFACTURE THEREOF

摘要

An optical waveguide structure comprising a III-V semiconductor substrate; a III-V semiconductor top layer; and, an etch stop layer sandwiched therebetween, the etch stop layer containing Aluminium or Phosphorous; the top layer comprising first and second spaced apart recesses extending through the top layer to the etch stop layer and defining an optical waveguide therebetween.