发明名称 |
Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus |
摘要 |
In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.
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申请公布号 |
US7478558(B2) |
申请公布日期 |
2009.01.20 |
申请号 |
US20060362583 |
申请日期 |
2006.02.24 |
申请人 |
PANASONIC CORPORATION |
发明人 |
FUJII EIJI;TORII HIDEO;TAKAYAMA RYOICHI;TOMOZAWA ATSUSHI;MURATA AKIKO;HIRASAWA TAKU |
分类号 |
G01C19/00;B41J2/045;B41J2/14;B41J2/16;G01C19/56;G01C19/5607;H01L41/04;H01L41/22;H01L41/24;H01L41/316 |
主分类号 |
G01C19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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