A SURFACE INSPECTION DEVICE AND AN ARRANGEMENT FOR INSPECTING A SURFACE

摘要

The invention concerns a device for inspecting a surface of a workpiece (1) comprising a processor for reading image data of the surface, wherein the image data comprises at least a bright field (B) and at least a dark field (Dl) . A portion (A) of the surface is in the image data in at least one position in the bright field . (B) and in at least a second position in the dark field (Dl) . The processor generates a result by comparing the portion (A) in the bright field (B) to the portion (A) in the dark field (Dl) in order to find surface anomalies, and outputs the result using an outputting means. Furthermore, the invention concerns a surface inspection arrangement for inspecting a workpiece (1) comprising the device, and further comprising a light source (2) , at least one image pick-up device (3) and means for transferring the image data from the image pick-up device (3) to the processor that reads image data.