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发明名称
TAISHITSUSEIOKOJOSHITAHANDOTAISOCHI
摘要
申请公布号
JPS5161781(A)
申请公布日期
1976.05.28
申请号
JP19740135481
申请日期
1974.11.27
申请人
HITACHI LTD
发明人
INABA TOORU
分类号
H01L29/73;H01L21/283;H01L21/314;H01L21/331;H01L29/70
主分类号
H01L29/73
代理机构
代理人
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