| 摘要 |
PURPOSE:To measure surely a flow rate even in a low-flow rate region, by controlling the timing of jetting of a control fluid from a control nozzle by an electric signal sent from a fluid detecting sensor so that sticking of a jetting fluid is switched forcibly. CONSTITUTION:The jetting fluid sticking to sticking walls 3 and 3' is detected by fluid detecting sensors 4 and 4'. Electric signals sent from fluid detecting sensors 4 and 4' are sent to a control fluid generator 8 through an amplifier 5, a filter 6, and a comparator 7 to generate the control fluid. The timing of jetting of the control fluid from the control nozzle is controlled by electric signals from fluid detecting sensors 4 and 4' so that sticking of the jetting fluid is switched forcibly. Thus, since oscillation is given to the jetting fluid forcibly to make the flow rate of a fluid to be measured minute, the flow rate is measured surely even in a low-flow rate region. |
