| 摘要 |
<p>PURPOSE:To reduce the generation of dust at a time when a floor mobile robot is moved by installing a linear guide mounted through a support member along a groove section to the lower section of a path section floor, turning a drive shaft for transfer set up in parallel with the linear guide and shifting the robot along the groove section. CONSTITUTION:A transfer robot M is slid on a linear guide 23 laid on a floor section 7b along a groove section 21 by turning a drive shaft 25b for transfer screwed to a female screw section for a connecting member 24 in the predetermined direction, and a wafer cassette 15 is carried up to the front of a prescribed production unit 13 from a stocker. An arm section M2 is driven in the horizontal and vertical directions, thus transferring a holding section M1 up to a predetermined position on the production unit 13 while placing the wafer cassette 15. The drive shaft 25b for transfer is rotated in the fixed direction again, thus carrying the wafer cassette up to the prescribed position of the stocker. Dust generated from a drive section for the transfer robot M is removed by a dust collector mounted to a station.</p> |
