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发明名称
METHOD OF ELEMENT ISOLATION
摘要
申请公布号
JPH01201924(A)
申请公布日期
1989.08.14
申请号
JP19880026093
申请日期
1988.02.05
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OISHI YOSHIRO;NISHIUMA MASAHIRO
分类号
H01L21/316;H01L21/76;H01L21/763
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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