| 摘要 |
<p>PURPOSE:To promote both simplification and miniaturization of the whole apparatus, by method wherein a part of observation means for visually observing the state of a fine-alignment mark is used as a part of image pickup means for pre-alignment. CONSTITUTION:Image pickup means 12 for picking up a pre-alignment mark 41 on the surface of a wafer 25, observation means 14 for observing the area in the vicinity of a fine-alignment mark on the surface of the wafer 25, and an image pickup section 20 having image pickup means for switching functions of the image pickup means 12 and the observation means 14 are provided. When fine-alignment cannot be performed, the wafer 25 is moved so that the area in the vicinity of the fine-alignment mark is observed by the image pickup section 20. As a result, both simplification and miniaturization of construction of the whole apparatus can be promoted, and both the functions of the image pickup means 12 and the observation means 14 are effectively actuated so that alignment can be performed with high accuracy.</p> |
