| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin-film vibrating apparatus which has a thin-film vibrator floated on a supporting substrate and surely prevents the thin-film vibrator from having an undesirable contact to the supporting substrate. <P>SOLUTION: In the piezoelectric thin-film vibrating apparatus, the thin-film vibrator 2 is arranged by being floated from an upper face of the supporting substrate and is comprised of a laminated film formed by laminating a plurality of thin films formed by a thin-film forming method, the thin-film vibrator 2 has a piezoelectric thin-film and first and second excitation electrodes formed on the upper face and a lower face of the piezoelectric thin-film, and the thin-film vibrator 2 has a rectangular shape and is fixed to the supporting substrate in a part of first and second edges 2a and 2b which oppose each other. In the apparatus, when the fixed parts are regarded as first and second supporting portions 12 and 13, the thin-film substrate 2 is wound so as to have the first and second supporting portions 12 and 13 position at the lowest sides of the first and second edges and so as to have the first and second supporting portions 12 and 13 position at the lowest side even in a direction connecting the first and second supporting portions 12 and 13. <P>COPYRIGHT: (C)2009,JPO&INPIT |
