| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To deal with rapid change in transporting speed as well, in a laser beam machining apparatus in which laser beam machining is performed, in a direction non-parallel to a transporting direction by prescribed intervals in the transporting direction, for a workpiece transported at a variable transporting speed. <P>SOLUTION: The laser beam machining apparatus is provided with a laser oscillator 22 and an optical device 24 that guides to the workpiece 12 a laser beam emitted from the laser oscillator 22. The optical device 24 includes a polygon mirror 40 for reflecting the laser beam to the workpiece and a servo motor 46 for rotatably driving the polygon mirror 40. The apparatus is also provided with a first sensor 60 for sending a signal with a period corresponding to the transporting speed and a second sensor 62 for sending a signal with a period corresponding to the rotary speed of the polygon mirror 40. In accordance with the change in the period of the signal from the first sensor, emission timing of the laser beam is controlled. Also, the rotary speed of the servo motor 46 is controlled in such a manner that the signal from the second sensor 62 follows up the signal from the first sensor. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
