发明名称 Apparatus and method for bonding silicon wafer to conductive substrate
摘要 A system and method is disclosed for bonding a substrate to a semiconductor die that is prone to curling when subjected to an elevated temperature in a solder reflow oven, for example, thereby improving the electrical and mechanical bonding for large dies, wafers, chips, and photovoltaic cells. In one embodiment, the substrate is adapted to curl to the same degree as the die to form a uniform gap between the substrate and die across the boundary there between. In another embodiment, solder used to bond the die and substrate is applied such that the volume deposited varies based on the expected gap between the die and substrate when heated to the melting temperature of the solder.
申请公布号 US7432596(B1) 申请公布日期 2008.10.07
申请号 US20050249129 申请日期 2005.10.12
申请人 ENERGY INNOVATIONS, INC. 发明人 BONE GREGORY ALAN
分类号 H01L23/48 主分类号 H01L23/48
代理机构 代理人
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