| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which is small in power consumption and small in frequency temperature variation amount. SOLUTION: The piezoelectric vibrator 10 has a base 21, and a pair of vibration arms 30 and 40 extended from the base 21 in parallel with each other, and the vibration arms 30 and 40 have additional masses 36 and 46 provided at tips, arms 35 and 45 thinner than the additional masses 36 and 46, and electrodes 51 to 60, respectively. Further, the crystal vibrator 10 has piezoelectric thin films 71 and 72 connected to a crystal vibration chip 20 in series and formed on top surfaces 31 and 41 of the arms 35 and 45, and piezoelectric thin film elements 100 and 101 including the electrodes 55 and 60 formed on top surfaces of the piezoelectric thin films 71 and 72. COPYRIGHT: (C)2008,JPO&INPIT
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