| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertically and horizontally effective air bearing that the eigenresonance of the system "pin+piston" (pin and piston) is minimized. SOLUTION: The air bearing has a base plate, an interface part movably arranged on the bottom part plate, a piston for supporting a load, which is movably arranged inside the interface part and vibration-isolated with respect to the bottom part plate and a coupling element for connecting the piston with the load. The coupling element preferably comprises a pin which is connected with the piston, particularly screwed into the piston. COPYRIGHT: (C)2008,JPO&INPIT |
