ELECTRONIC CIRCUIT DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a transparent substrate having a tin oxide thin film which can be patterned without any problem with an ablation phenomenon caused even if the substrate is irradiated with a laser beam low energy. SOLUTION: By the manufacturing method of a transparent substrate with a circuit pattern, a circuit pattern is formed on the transparent substrate by the irradiation of a laser beam of a wavelength of 1,064 nm on the transparent substrate with a thin film having a transparent conductive film with a carrier concentration of 5×1019/cm3or higher on the transparent substrate. COPYRIGHT: (C)2007,JPO&INPIT