发明名称 Methods of forming devices having optical functionality
摘要 Provided is a method of forming a device having optical functionality. The method includes forming an optical waveguide over a substrate by providing a clad layer and a core over the substrate. The clad layer includes a polymer having units of the formula (RSiO<SUB>1.5</SUB>), wherein R is a substituted or unsubstituted organic group, and a photoactive component. A portion of the clad layer is photolithographically patterned. Also provided is a method of forming a printed wiring board having optical functionality. The invention has particular applicability in the electronics industry for forming optoelectronic devices.
申请公布号 US2006098933(A1) 申请公布日期 2006.05.11
申请号 US20050195967 申请日期 2005.08.03
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC 发明人 SHELNUT JAMES G.;PUGLIANO NICOLA;MOYNIHAN MATTHEW L.;SICARD BRUNO M.
分类号 G02B6/10 主分类号 G02B6/10
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