| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a nozzle plate, an inkjet printing head equipped with the same, and a manufacturing method of a nozzle plate. <P>SOLUTION: In the nozzle plate, at least one nozzle is formed penetrating, and a heater is arranged in the periphery of the nozzle. The heater deflects an ejection direction of a fluid ejected through the nozzle by partly heating the fluid in the nozzle and changing a surface tension of the part. The heater is divided to at least two segments disposed in the periphery of the nozzle via a predetermined interval to the nozzle. An electrode for driving at least the two segments independently of each other is coupled at least to the two segments. The inkjet printing head is equipped with a passage plate where an ink passage with a plurality of pressure chambers is formed, a piezoelectric actuator formed at an upper part of the passage plate, and the nozzle plate adhered to a bottom face of the passage plate. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
