| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device for cleaning micromatter adsorption sheets capable of simply and beautifully performing cleaning of the micromatter adsorption sheets. SOLUTION: Upper and lower tacky rolls 3A and 3B for sandwiching a micromatter adsorption sheet S from above and below to remove its adhered matter by tackiness are freely rotatably journalled to a frame 1, and also a winding roll 5 is freely rotatably, and attachably and detachably journalled to the frame 1. A guide table 21 for guiding the micromatter adsorption sheet S through the upper and lower tacky rolls 3A and 3B is openably and closably installed to the frame 1 at an opening position extended from the frame 1 along an extension from the contact surface of the upper and lower tacky rolls 3A and 3B, and a closing position to be closed with respect to the frame 1. Telescopic stays 23b and 23c for holding the guide table 21 at the opening position are stretched between the guide table 21 and the frame 1. COPYRIGHT: (C)2009,JPO&INPIT
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