| 摘要 |
Provided is a method for manufacturing a probe sheet, by which a needlepoint can be arranged at an accurate prescribed position without troublesome position adjustment of the needlepoint in a connecting operation of each contact with a probe sheet main body. The probe sheet is provided with the probe sheet main body, which has an electrically conducting path and a plurality of contacts formed to protrude from one surface of the probe sheet main body to be connected to the electrically conducting path. The manufacturing method includes a step of forming the contacts on a base by successively depositing a metal material, which is for the contacts, from the needlepoint to the base portion of each contact, by using photolithography technology on the base; a step of forming on the base the probe sheet main body, which is connected with the base portion of each contact held on the base; and a step of separating the contact integrally with the probe sheet main body from the base. ® KIPO & WIPO 2009
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