| 摘要 |
PROBLEM TO BE SOLVED: To provide a knowledge preparation support system capable of finding easily the optimum measuring condition effective for inspection. SOLUTION: This knowledge preparation support system is provided with a profile computing part 15 for finding a profile that is a set of respective feature quantity values found as to prescribed combinations of feature quantities and parameters, in a plurality of waveform data acquired while changing the measuring condition, and a profile collective display part 19 for displaying simultaneously the plurality of profiles in each measuring condition found by a profile computing means thereof. The profile collective display part is constituted to display the profiles based on the individual measuring conditions by biaxial orthogonal coordinates comprising an axis of the feature quantity and an axis of the parameter. COPYRIGHT: (C)2009,JPO&INPIT
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