发明名称
摘要 <P>PROBLEM TO BE SOLVED: To provide a process for producing a hyperbranched polymer suitable as a polymer material for the nanofabrication typified by the photolithography. <P>SOLUTION: The production process for the hyperbranched polymer comprises producing a hyperbranched polymer having a core portion prepared by a living radical polymerization of chloromethyl styrene or the like, and an acid decomposition group such as p-tert-butoxy styrene, which is linked to the core portion and is present at the end of a molecule of the polymer. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP4190563(B2) 申请公布日期 2008.12.03
申请号 JP20070027203 申请日期 2007.02.06
申请人 发明人
分类号 C08G61/00;G03F7/039;H01L21/027 主分类号 C08G61/00
代理机构 代理人
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